แบรนด์ : TOKYO KEISO



  • High accuracy
    • Accurate flow measurement as high as ±1% R.D. between 10 to 100% F.S. and ±0.5% R.D. in less than 10% F.S. thanks to the unique calibration facilities.
  • Metallic sealing
    • The sensor has a metallic sealing mechanism, durable and corrosion resistant.
  • Low pressure loss
    • Negligible small pressure loss by a simple sensor made of stainless steel placed in the flow path.
  • High speed response
    • Not more than 1 second at 63% response.
  • Temperature indication
    • The sensor consists of a heated sensor and a temperature sensor which allows also temperature indication in the piping.
  • Pressure compensation
    • Flow rate compensation by inputting 4 to 20 mADC pressure signal for unstable process.
  • Flow rate unit
    • Normal flow rate at 0°C and 1 atm, standard flow rate, actual flow rate or mass flow rate is available.
  • RoHS, CE marking (planning to comply with)



  • Semiconductor equipment gas lines
  • Medical oxygen supply lines
  • HVAC
  • Process and utility lines for general industry


Short Specifications

Insertion type for large pipe sizes Integral type / Separate typeInline type for medium pipe sizes Integral type / Separate typeInline type for small pipe sizes Integral type / Separate typeVariable length insertion type
Measuring objectNon-corrosive gases
Process connectionFlange JIS 10K/20K, ANSI 150/300, JPI 150/300
Insertion type by tube fitting Outside diameter 20 mm
SWL, VCR, Rc 3/8", 1/2", 3/4", 1"
Wafer 40 to 150 mm
Meter size50A to 1500A40A to 150A10A to 25A50A to 900A
Fluid temperature-20 to 120℃
Pressure1 MPa Max.
Flow rangeAir/N₂
Max.: 35600 to 891700m³/h(nor)
Min.: 63 to 1200 m³/h(nor)
Max.: 425 to 10600 m³/h(nor) Min.: 50 to 780m³/h(nor)
Max.: 33 to 330 m³/h(nor)
Min.: 6.0 to 60 m³/h(nor)
Max.: 12840 to 321000 m³/h(nor)
Min.: 63 to 1200 m³/h(nor)
Material contacting gasesSUS316L, SUS316, SCS14
Sensor element is made of SUS316L
Power supply24±10% VDC
Protection classIP65



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