UCUF-M
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หมวดหมู่ : INSTRUMENTS , TOKYO KEISO , Flow Measurement , Custom-made Products ,
แบรนด์ : TOKYO KEISO
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Features
- EMC compliance: EN61326-1
- RoHS compatible
- A standardized pitch of 80 mm for connecting tubes
- Liquids with kinematic viscosity of as high as 40 mm2/s can be measured.
- Accuracy: Within ± 1% of the reading at flow velocity of 1 m/s or more
- Wide rangeability of 100:1(at low cut-off of 1% F.S.)
- Detector with highly clean construction
- Corrosion resistant and easy to install
Applications
- Pure water and ultrapure water in the semiconductor manufacturing process
- Chemical feeding
- Highly corrosive chemicals
- Chemical mechanical polishing (CMP) slurries
- Process liquids of small and medium flow rate
- Ideal for flow measurement and control of cleaning and CMP processes
Short Specifications
| Measuring fluid | Liquids (those that do not contain air bubbles and permeate or corrode PFA) |
|---|---|
| Tube inner diameter | 2.5, 4(connection 1/4"), 4(connection 3/8"), 6, 10, 15, 20mm |
| Flow range | Max. 0 to 80.0 L/min Min. 0 to 0.01 L/min |
| Measuring accuracy | ± 1.0% of reading(Flow velocity1m/s) |
| Refer to the catalog for the accuracy of the velocity less than 1m/s. | |
| Fluid temperature | 10 to 90°C |
| Fluid pressure | 0 to 0.5 MPa |
| Sound speed | 1000 to 2200 m/S |
| Fluid kinematic viscosity | 0.8 to 40 mm² /s |
| Liquid contact material | PFA |
| Process connection | PFA tube end |
| Signal cable | 2 coaxial cables (5 m) attached (Up to 30 m with extension cables) |
| Connecter | SMB, BNC |
| Enclosure classification | IP65 (indoor use) |
