UCUF-M

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แบรนด์ : TOKYO KEISO

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Features

  • EMC compliance: EN61326-1
  • RoHS compatible
  • A standardized pitch of 80 mm for connecting tubes
  • Liquids with kinematic viscosity of as high as 40 mm2/s can be measured.
  • Accuracy: Within ± 1% of the reading at flow velocity of 1 m/s or more
  • Wide rangeability of 100:1(at low cut-off of 1% F.S.)
  • Detector with highly clean construction
  • Corrosion resistant and easy to install

 

Applications

  • Pure water and ultrapure water in the semiconductor manufacturing process
  • Chemical feeding
  • Highly corrosive chemicals
  • Chemical mechanical polishing (CMP) slurries
  • Process liquids of small and medium flow rate
  • Ideal for flow measurement and control of cleaning and CMP processes

 

Short Specifications

Measuring fluidLiquids (those that do not contain air bubbles and permeate or corrode PFA)
Tube inner diameter2.5, 4(connection 1/4"), 4(connection 3/8"), 6, 10, 15, 20mm
Flow rangeMax. 0 to 80.0 L/min
Min. 0 to 0.01 L/min
Measuring accuracy± 1.0% of reading(Flow velocity1m/s)
Refer to the catalog for the accuracy of the velocity less than 1m/s.
Fluid temperature10 to 90°C
Fluid pressure0 to 0.5 MPa
Sound speed1000 to 2200 m/S
Fluid kinematic viscosity0.8 to 40 mm² /s
Liquid contact materialPFA
Process connectionPFA tube end
Signal cable2 coaxial cables (5 m) attached (Up to 30 m with extension cables)
ConnecterSMB, BNC
Enclosure classificationIP65 (indoor use)

 

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