CLFC300

Features

• Improved flow measurement
  
  • Flow measurement is stabilized by faster calculation and improved bubble resistance.
    
• Excellent controllability
  
  • A quick step response is achieved by state-of-the-art signal processing technology. The CLFC300 tracks variations in the flow and returns it to the set point within 1.5 seconds.
    
• Two valves for wider applications
  
  • A needle valve is available for chemical liquids and DIW, and a pinch tube valve for slurry liquids. The STA-PURE style pcs tube is added to the lineup of pinch tubes. This tube has excellent durability and does not need to be replaced regularly.
    
• Lightweight and compact
  
  • An ultrasonic flowmeter, a control valve, and a circuit are all contained in a single case. In addition, the layout was revised to make the controller more compact: it is now 20% smaller and 35% lighter.
    
• Easy installation
  
  • No complicated piping or wiring is required: simply connect the fittings and multi-core cables to complete the installation.
    
• Eco-friendly
  
  • Power consumption is reduced by 35%. All parts are comply with the RoHS requirements.
    
• Corrosion-resistant
  
  • The CLFC uses highly-corrosion-resistant PFA and PTFE for wetted parts and ultra-durable PVDF for the case.
    
  • It is ideal for the semiconductor industry and other industries that use corrosive chemicals.
    
• EMC-compliant
  
  • The controller conforms to EN 61326-1: 2006.

Applications

• Constant feed of chemical liquids and DIW
  
  • The CLFC300 ensures accurate and stable feed control of chemical liquids and DIW, which was conventionally conducted by metering pumps and static head tanks.
    
• Control of concentration
  
  • When CLFC300 are installed both in chemical liquids and pure water lines, they help directly dilute chemicals with pure water while controlling the concentration accurately and stably.
    
• Constant feed of slurry
  
  • The CLFC300 on various slurry lines of CMP devices ensures stable and constant feed of slurry and saves valuable liquids.

Short Specifications