UCUF-K

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แบรนด์ : TOKYO KEISO

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Features

  • EMC compliance: EN61326-1:2013/EN61326-2-3:2013
  • RoHS compatible
  • Liquids with kinematic viscosity of as high as 40 mm2/s can be measured.
  • Accuracy: Within ±1% of the reading at flow velocity of 1 m/s or more
  • Wide range ability of 100 : 1 as a typical example
  • Detector with highly clean construction
  • Corrosion resistant and easy to install


Recommended Applications (Flow Measurement)

  • Pure water and ultrapure water in the semiconductor manufacturing process
  • Chemical feeding
  • Highly corrosive chemicals
  • Chemical mechanical polishing (CMP) slurries
  • Process liquids of small and medium flow rate
  • Ideal for flow measurement and control of cleaning and CMP processes

 

Short Specifications

For Detector

Size4mm, 6mm, 10mm, 15mm, 20mm
Measuring ObjectLiquid (Without bubbles, and homogeneously mixed)
Flow rangeMin: 0 to 0.8 L/min(04K), Max: 18.8 to 80 L/min(20K)
Fluid sound speed1000 to 2200m/s
Fluid kinetic viscosity0.3 to 4.0mm2/s
Fluid temperature+10 to +60°C
Fluid pressure0 to 0.5MPa
Wetted parts materialNew PFA
Process connectionPFA tube end

 

For Compatible Convertor

ModelSFC3000SFC4000
InstallationDIN rail installationPanel mounting
Appearance


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