UCUF-02M

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แบรนด์ : TOKYO KEISO

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Features

  • Small size: The UCUF-02M/SFC-010L can measure ultrasonic propagation through liquids in the φ2.5 tubing, which is difficult for other flowmeters to measure.
  • Low flow measurement: 0 to 10 mL/min
  • EMC compliance: EN61326-1
  • RoHS compatible
  • Liquids with kinematic viscosity of as high as 40 mm²/s can be measured.
  • Detector with highly clean construction
  • Corrosion resistant and easy to install
  • Accuracy: Within ±1% of the reading at a flow rate of 25 mL/min or more

Applications

  • Pure water and ultrapure water in the semiconductor manufacturing process
  • Chemical feeding
  • Highly corrosive chemicals
  • Chemical mechanical polishing (CMP) slurries
  • Process liquids of small flow rate
  • Ideal for flow measurement and control of cleaning and CMP processes

 

Short Specifications

For Detector

ModelUCUF-02M
Measuring ObjectLiquids (those that do not contain air bubbles and permeate or corrode PFA)
Flow range0 to 100 mL/min (max.)
0 to 10 mL/min (min.)
Full scale setting in 10 mL/min steps
Accuracy±1% RD (at a flow rate of 25 mL/min or more)
±0.25 mL/min (at a flow rate of up to 25 mL/min)
For water of 20℃
Fluid temperature10 to 90 °C
Fluid pressure0 to 0.5 Mpa
Process connection1/4" PFA tube end
MaterialPFA
ConstructionIP65 (indoor use)
cable5 m (standard)

 

For Compatible Convertor

ModelSFC-010L
Display4-digit LED, Instantaneous flow rate (%FS)
Output
1) Current: 
4 to 20 mA DC(Load resistance: within 500 Ω)
2) Frequency: 
Open collector pulse
Load rating: 30 V DC, 10mA 0 to 1000 Hz
3) Alarm: 
Open collector, 2 points
Load rating: 30 V DC, 10 mA
Power supply24 V DC± 10%
InstallationDIN rail installation
ConstructionIP20 (indoor use)


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