UCUF-02M
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หมวดหมู่ : INSTRUMENTS , TOKYO KEISO , Flow Measurement , Ultrasonic Flowmeters for Built-in Use ,
แบรนด์ : TOKYO KEISO
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Features
- Small size: The UCUF-02M/SFC-010L can measure ultrasonic propagation through liquids in the φ2.5 tubing, which is difficult for other flowmeters to measure.
- Low flow measurement: 0 to 10 mL/min
- EMC compliance: EN61326-1
- RoHS compatible
- Liquids with kinematic viscosity of as high as 40 mm²/s can be measured.
- Detector with highly clean construction
- Corrosion resistant and easy to install
- Accuracy: Within ±1% of the reading at a flow rate of 25 mL/min or more
Applications
- Pure water and ultrapure water in the semiconductor manufacturing process
- Chemical feeding
- Highly corrosive chemicals
- Chemical mechanical polishing (CMP) slurries
- Process liquids of small flow rate
- Ideal for flow measurement and control of cleaning and CMP processes
Short Specifications
For Detector
| Model | UCUF-02M |
|---|---|
| Measuring Object | Liquids (those that do not contain air bubbles and permeate or corrode PFA) |
| Flow range | 0 to 100 mL/min (max.) 0 to 10 mL/min (min.) Full scale setting in 10 mL/min steps |
| Accuracy | ±1% RD (at a flow rate of 25 mL/min or more) ±0.25 mL/min (at a flow rate of up to 25 mL/min) For water of 20℃ |
| Fluid temperature | 10 to 90 °C |
| Fluid pressure | 0 to 0.5 Mpa |
| Process connection | 1/4" PFA tube end |
| Material | PFA |
| Construction | IP65 (indoor use) |
| cable | 5 m (standard) |
For Compatible Convertor
| Model | SFC-010L |
|---|---|
| Display | 4-digit LED, Instantaneous flow rate (%FS) |
| Output |
|
| Power supply | 24 V DC± 10% |
| Installation | DIN rail installation |
| Construction | IP20 (indoor use) |
