แบรนด์ : TOKYO KEISO



  • Small size: The UCUF-02M/SFC-010L can measure ultrasonic propagation through liquids in the φ2.5 tubing, which is difficult for other flowmeters to measure.
  • Low flow measurement: 0 to 10 mL/min
  • EMC compliance: EN61326-1
  • RoHS compatible
  • Liquids with kinematic viscosity of as high as 40 mm²/s can be measured.
  • Detector with highly clean construction
  • Corrosion resistant and easy to install
  • Accuracy: Within ±1% of the reading at a flow rate of 25 mL/min or more


  • Pure water and ultrapure water in the semiconductor manufacturing process
  • Chemical feeding
  • Highly corrosive chemicals
  • Chemical mechanical polishing (CMP) slurries
  • Process liquids of small flow rate
  • Ideal for flow measurement and control of cleaning and CMP processes


Short Specifications

For Detector

Measuring ObjectLiquids (those that do not contain air bubbles and permeate or corrode PFA)
Flow range0 to 100 mL/min (max.)
0 to 10 mL/min (min.)
Full scale setting in 10 mL/min steps
Accuracy±1% RD (at a flow rate of 25 mL/min or more)
±0.25 mL/min (at a flow rate of up to 25 mL/min)
For water of 20℃
Fluid temperature10 to 90 °C
Fluid pressure0 to 0.5 Mpa
Process connection1/4" PFA tube end
ConstructionIP65 (indoor use)
cable5 m (standard)


For Compatible Convertor

Display4-digit LED, Instantaneous flow rate (%FS)
1) Current: 
4 to 20 mA DC(Load resistance: within 500 Ω)
2) Frequency: 
Open collector pulse
Load rating: 30 V DC, 10mA 0 to 1000 Hz
3) Alarm: 
Open collector, 2 points
Load rating: 30 V DC, 10 mA
Power supply24 V DC± 10%
InstallationDIN rail installation
ConstructionIP20 (indoor use)


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